In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. https://www.macorners.shop/product-category/color-changing-cup/
Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2
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